Piezoresistive Cantilever Optimization and Applications
نویسندگان
چکیده
Piezoresistors are commonly used in microsystems for transducing force, displacement, pressure and acceleration. Silicon piezoresistors can be fabricated using ion implantation, diffusion or epitaxy and are widely used for their low cost and electronic readout. However, the design of piezoresistive cantilevers is complicated by coupling between design parameters as well as fabrication and application constraints. Here we discuss analytical models and design optimization for piezoresistive cantilevers, and describe several applications ranging from studying electron movement using scanning gate microscopy to measuring the biomechanics of whole organisms.
منابع مشابه
High sensitivity piezoresistive cantilever design and optimization for analyte-receptor binding
The mechanical design and optimization of piezoresistive cantilevers for biosensing applications is studied using finite element analysis. The change of relative resistivity of piezoresistive microcantilevers is analyzed in the presence of the chemical reaction at the receptor surface under the condition of oscillating flow. Chemo-mechanical binding forces have been analyzed in order to underst...
متن کاملDesign of Piezoresistive Silicon Cantilevers with Stress Concentration Region (SCR) for Scanning Probe Microscopy (SPM) Applications
This paper describes and evaluates the incorporation of novel Stress Concentration Region (SCR) in silicon based cantilevers to enhance piezoresistive displacement, force, and torque sensitivities. In brief, SCR is a region, on the cantilever, with a thickness smaller than the cantilever thickness and of an appropriate length to localize stress where piezoresistors are implanted. It was found t...
متن کاملPiezoresistive cantilever array for life sciences applications
Atomic Force Microscopy (AFM) techniques are used with oneor two-dimensional arrays of piezoresistive probes for parallel imaging. We present a newly designed AFM platform to drive these passivated piezoresistive cantilever arrays in air and liquid environments. Large area imaging in liquid as well as qualitative and quantitative analysis of biological cells are demonstrated by the means of pie...
متن کاملOn the design of piezoresistive silicon cantilevers with stress concentration regions for scanning probe microscopy applications
In this paper, the design of silicon based cantilevers for scanning probe microscopy has been described in detail. ANSYS software has been used as a tool to design and model the mechanical properties of the silicon based cantilevers. The incorporation of stress concentration regions (SCRs) with a thickness smaller than the cantilever thickness, to localize stresses, has been explored in detail ...
متن کاملTwo Dimensional Array of Piezoresistive Nanomechanical Membrane-Type Surface Stress Sensor(MSS) with Improved Sensitivity
We present a new generation of piezoresistive nanomechanical Membrane-type Surface stress Sensor (MSS) chips, which consist of a two dimensional array of MSS on a single chip. The implementation of several optimization techniques in the design and microfabrication improved the piezoresistive sensitivity by 3~4 times compared to the first generation MSS chip, resulting in a sensitivity about ~10...
متن کامل